| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
2006-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7adcb1d0a41fce28704a85d44366c4dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ce11fcb726156ed0943c64d5f59d87 |
| publicationDate |
2010-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I328252-B |
| titleOfInvention |
Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
| priorityDate |
2005-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |