| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2006-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43daf9bad28d592cc648ec80e830740e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6db67ab5fb8848c7f1061c257e036e6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a62852d2e19454cc972dbb01d0f26b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5350d05ff2d0dc0284e93fc68464adc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4da215ed301a7d76c1c4ac76d7385a32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33fdec7179aafbe34c4c344a136eb129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af18bd2705e95743310a056ea25aebdd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05921112cd265904d6c03276a497000f |
| publicationDate |
2010-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I328050-B |
| titleOfInvention |
Reeling type plasma cvd device |
| priorityDate |
2005-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |