Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
filingDate |
2006-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2010-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ddffe4db46f62630816ae56efc5ff0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff37d7ae5f5a9b8fb3f1085678217500 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c4fc36c286133423961283b05346377 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_012ff7e7830c5b8edab1d44a19712218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31ed0e7191632a5f9009755f39fe3f4c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa0299c11a342868bb81bc9fde5f0b72 |
publicationDate |
2010-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I323280-B |
titleOfInvention |
Abrasive for silicon oxide, additive liquid and polishing method |
priorityDate |
2005-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |