| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_04ed4b24e22b826d89bab36ebf75bc4f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2005-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c53a30c5c2e5f617cf63ecf20954fdc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_043a8e5035cf46fd8298e536b17c4cfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb7264aa51eeee929fe66f68f50b7f8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d56f75385b50229259efb6a47f336c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ba70369810b2627055ef2b224d6e31d |
| publicationDate |
2010-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I322467-B |
| titleOfInvention |
Processing liquid and processing method for a semiconductor device and semiconductor manufacturing equipment |
| priorityDate |
2004-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |