| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_307f9f27bb60c1fdeb11813c2321e411
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_648479b7e46be2d187bb42c38c1b3273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c82abd21c243128ca5811f72cc629c64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e2f9a820c70cd58bca0c57ea875d893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af097931bcd43b84c45255d6248714ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bb69e75934aca023d32a93e511c58c3 |
| publicationDate |
2010-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I320949-B |
| titleOfInvention |
Semiconductor process |
| priorityDate |
2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |