| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2002-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e9209f846eef29b15888a1bc1f91c85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_065b7346cff366f288a474bc540b3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6ec9bf309c10d6c4abfde7b6a613154 |
| publicationDate |
2010-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I320214-B |
| titleOfInvention |
Method of forming a trench isolation structure |
| priorityDate |
2002-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |