| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2006-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1864ecd62b1678620f858b0f75ce641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34495acb00e45203342db3e5b42a9b82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18809f31aec61e31a923688399991896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5226b0a3e6dd79d0faf53c7b9ef6419 |
| publicationDate |
2010-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I320052-B |
| titleOfInvention |
Composition and associated method for catalyzing removal rates of dielectric films during chemical mechanical planarization |
| priorityDate |
2005-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |