http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I310967-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43a4dc0d31aa6016dc7428009c19f40c |
| publicationDate | 2009-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I310967-B |
| titleOfInvention | Method and deposition system for increasing deposition rates of metal layers from metal-carbonyl precursors |
| priorityDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.