| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a37d7a7385924dd55e29ac1e96d1492 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2002-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b180b4fa267724a75df222d197f6b992
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abbf43a10d3b4e6a09656c11612f0e86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f61636ff58628cb1db46fe23fd90b6a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1072e0dd0e97bd4691d0e5541934f61 |
| publicationDate |
2009-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I310409-B |
| titleOfInvention |
Sputtering target |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9922807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9023487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9139900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I565678-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9490108-B2 |
| priorityDate |
2001-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |