| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-46 |
| filingDate |
2003-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92194bf3de4bd2c3c3ff359a0a1f7b2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e23a6e9035a3a681b4c519761aaf49c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_761d3e0005fc1eebfb8fbeea290ae555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63d433a4e53c23f6051606fa35aeff89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eab663e521ad84e6896e7f697d026170
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ad2f0b630b09a352cf0f97c3b2546c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ace6114f29fda36bed30841d8d2d593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8e5dd0086a157279da3389d0880ed46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c75651fd7b327fcf5f91f25aa6dcf85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c50a26018fc71030da66bf011555d76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee04bd27314a1c560037fd02773cb70e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19627dddced44dc1bdbc90694a5af1b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84837cbe7220da210956e9a8ed7c1d78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a073599a55096069cf5a24b6cc58631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50667128753db8008a7ae44c012edc82 |
| publicationDate |
2009-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I306895-B |
| titleOfInvention |
Slurry for mechanical polishing (cmp) of metals and use thereof |
| priorityDate |
2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |