| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32055 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| filingDate |
2006-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd5d18d422d8ad50bd0e9aff0eda90d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d740083bd9447927db5585d96fe4296b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d96c588bde5c758253be5261ff9912b |
| publicationDate |
2009-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I306629-B |
| titleOfInvention |
Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor |
| priorityDate |
2005-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |