| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc05229904be2987713acc8b41db7cd3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2003-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddae86a665a9522baf66ef50073aaaa4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18b958b8d1145e2354e4612ca18c025c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a3bc977e436df2134951f6492547123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d613c2cbd0123fefceca34d1c7c7ae5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16d163820a726fb45a12e8022a636495 |
| publicationDate |
2008-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I304519-B |
| titleOfInvention |
Negative-working photoimageable bottom antireflective coating |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512825-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8344083-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8613986-B2 |
| priorityDate |
2002-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |