| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2005-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaf663e439ecb48ed392a42e7171e632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c62e719daed7029b836dd25b02f8356c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38d8e7df59ae1e1c0a34212237d652af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edeae83a42a9aca531d0b6da45989cc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcc9d768291b3736110c916aec2775d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_157c6ae3d2b0e6b785f48fda1b01714c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c4aeaf04342b5a18ff4d19c3d3f108a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87b25612de61df86aac5fb0f5e40bb46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd65913f7e8d94888c2c798fda5cea7a |
| publicationDate |
2008-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I295814-B |
| titleOfInvention |
Robust fluorine containing silica glass (fsg) film with less free fluorine |
| priorityDate |
2004-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |