http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I290482-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8646 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8668 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-72 |
| filingDate | 2003-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83d100a498dcb9cf0c92a648e09f175b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de8c5b81751571d03c8fde11a3fc6423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 |
| publicationDate | 2007-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I290482-B |
| titleOfInvention | Method for cleaning exhausted gas |
| abstract | The object of the invention is to provide a method for cleaning an exhausted gas, the method of which has the capability of easily cleaning an exhausted gas, such as the gas exhausted from a device for manufacturing semiconductor containing nitrogen oxides and/or organic solvents in high concentration and having high fluctuation in concentration, into a clean gas without using a large cleaning device or a cleaning device having complex constructions under a lower temperature and in higher decomposing ratio. The invention provides a method comprising contacting an exhausted gas containing nitrogen oxides and/or organic solvents with a cleaning reagent having a metal and a metal oxide as an effective component, or a cleaning reagent having a lower-order metal and a higher-order metal oxide as an effective component under heating in order to conduct a reduction of nitrogen oxides and/or an oxidation decomposition of organic solvents, in the mean while substantially detects the increase-reduction amount or deviation of the cleaning reagent inducing from the redox reaction and supply gas at the time of components' ratio of the cleaning reagent departing from the pre-designated range of administration so as to restore the components' ratio of the cleaning reagent while cleaning the exhausted gas. |
| priorityDate | 2002-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.