http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I285577-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b816aa560ddcda10c992673c7f51036e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3d8cdc9cafe6051b4a50a616425ea46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate | 2004-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcdec5050190166cf30080370c069d7a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_160bd9a81b66e375bab44d7396f02180 |
| publicationDate | 2007-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I285577-B |
| titleOfInvention | Polishing platen and surface treatment thereon |
| abstract | This invention discloses a polishing platen made by a platen body that is subject to surface treatment. The platen body is subject to roughening process to form an uneven surface. A coating layer consisting of a fluorinated carbon resin is then formed over the platen body by spraying and powder coating such materials as fluorinated carbon resin over the platen. The platen is then subject to polishing at desired local regions so as to ensure that the thickness of the coating layer is within the range of 100 to 150 mu meter and the surface roughness is less then 30 mu meter. |
| priorityDate | 2004-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.