http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I282597-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2111-805 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5032 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-64 |
| filingDate | 2005-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e481afa4206e633e2cb27fa94b5d54d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10896313cf33014064e58e86dfa03cab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c3cbf13c98af625b738522f4dd043c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79f50db663323b6f4c5767b24bed7910 |
| publicationDate | 2007-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I282597-B |
| titleOfInvention | Yttrium-containing ceramic coated material and method of manufacturing the same |
| abstract | To provide an yttrium-containing ceramic's coated material which is excellent in corrosion resistance to a corrosive gas, plasma, etc., being excellent in adhesion between a substrate and the coating, and being suitably used for a semiconductor manufacturing process especially for repeated operations in a plasma treatment apparatus, and a method of manufacturing the same. The yttrium-containing ceramic coated material is manufactured by way of the method having a step of applying an yttrium MOD coating agent on a substrate surface, and performing a heat treatment so as to form an amorphous yttrium-containing ceramic film, and a step of further applying the yttrium MOD coating agent on the above-mentioned amorphous yttrium-containing ceramic film, performing a heat treatment at a higher temperature than a temperature of the above-mentioned former heat treatment so as to form a more crystalline yttrium-containing ceramic film. |
| priorityDate | 2004-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.