| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2005-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ebb7023caec84c97cc7f7032402199c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2397b654164ad8a0cc445ea2801161b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_141aa08b064fcd1d40055902700488c8 |
| publicationDate |
2007-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I279858-B |
| titleOfInvention |
Supercritical fluid processing system having a coating on internal members and a method of using |
| abstract |
A processing system utilizing a supercritical fluid for treating a substrate is described as having internal members having a coating. For example, the coating in internal members can reduce particulate contamination during processing. Additionally, a method for using the processing system is described. |
| priorityDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |