http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I276920-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00 |
| filingDate | 2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b4d423e3fa983b099420c2d380eaa75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6068319f9279ed74d41db69dc719c517 |
| publicationDate | 2007-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I276920-B |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| abstract | A positive resist composition has high etching resistance and high resolution. A pattern formation method uses the positive resist composition. The positive resist composition includes a resin component (A) having an acid dissociable dissolution inhibiting group and increasing the alkali-dissolvability thereof by an action of acid, and an acid generating component (B) which generates an acid by exposure, wherein the resin component (A) is a polymer having a constitutional unit (a1) represented by the following general formula (I), and a part of the hydroxyl groups of the unit (a1) is protected by substitution of hydrogen atoms thereof by an acid dissociable dissolution inhibiting group represented by the following general formula (II), wherein R represents a hydrogen atom or methyl group, R1 represents an alkyl group with 1-5 carbon atoms; R2 represents an alkyl group with 1-5 carbon atoms or hydrogen atom; X represents an aliphatic polycyclic group with 10-16 carbon atoms, or an aromatic polycyclic hydrocarbon group. |
| priorityDate | 2003-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.