| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e58a7247d4c843be828cff866761ddd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e3c990dc67c29a8cfb71a9db599f13d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e70c0aeade92d7571d955d3b90ea06e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J19-00 |
| filingDate |
2002-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6acc1c9e10d6bf0b8b84adc0dd0f3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b170f4f1498c87488b1e3cc4684be901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff9a9d48d3c71db555614bcde85395cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8900580600c47ed67a94ed5caebc6f0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb44b41666b198cd7b6574a3431b6250 |
| publicationDate |
2007-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I276194-B |
| titleOfInvention |
Transfer member with electric conductivity and its manufacturing method |
| abstract |
An electrically conductive transfer member for transferring precision equipment materials such as silicon wafers for semiconductors and glass substrates for liquid crystal display devices, as well as the method of manufacturing the transfer member. The transfer member has a carbon fiber reinforced composite material body with an electroconductive polymer part connected to at least some of the carbon fibers of the body. The electroconductive transfer member removes static electricity of the components transferred by the transfer member. |
| priorityDate |
2001-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |