| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B9-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2005-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59638a8ac20e92fb23647202658aa880
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a62fa07cdb50f820b6d38cedf9d8cf6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed9fa2b763a1be7df344c0d6046d9761 |
| publicationDate |
2007-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I272646-B |
| titleOfInvention |
Method of processing a substrate |
| abstract |
The present invention discloses a method of processing a substrate, which comprises: applying a surfactant or a water soluble polymer agent onto a surface of a substrate to be processed; and sliding a circumferential portion of the substrate and a polishing member against each other to polish the circumferential portion of the substrate. |
| priorityDate |
2004-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |