| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c02bb431eedd6890ee8a87744945bc2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H3-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00 |
| filingDate |
2003-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36497bfe7348aa8a9bbc813957e69a07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22dd149fed655b7b4bf22d0c0b60b4eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42a559af5fe7e10e8fc5707229eae186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b18112a76583cb04f9c6ce9a82555023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef49f5cc3ff813c710e53caa96a9d71d |
| publicationDate |
2007-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I271246-B |
| titleOfInvention |
Electrolytic processing apparatus and method |
| abstract |
There is provided an electrolytic processing apparatus and method that can effect processing of a substrate with high processing precision and can produce an intended form of processed substrate with high accuracy of form. The electrolytic processing apparatus includes: a holder for holding a substrate; a processing electrode that can come close to the substrate; a feeding electrode for feeding electricity to the substrate; an ion exchanger disposed in the space between the substrate and the processing electrode, or the substrate and the feeding electrode; a fluid supply section for supplying a fluid into the space; a power source for applying a voltage between the processing electrode and the feeding electrode; a drive sections for allowing the substrate and the processing electrode, facing each other, to make a relative movement; and a numerical controller for effecting a numerical control of the drive sections. |
| priorityDate |
2002-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |