http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I271214-B

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdf9b968e44c994d9d419feabed26e8d
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
filingDate 2000-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ceb148e25872db0d9ffe57ce9450ebb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66d625b1a97f6a4f5f093e3b876cd3ee
publicationDate 2007-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I271214-B
titleOfInvention Apparatus and method of irradiating ultraviolet light
abstract An ultraviolet light beam irradiating apparatus 10 of the present invention has a bed 13 for supporting a work T in atmosphere, an ultraviolet light irradiation light source 11 for irradiating the surface of the work T with an ultraviolet light beam having a wavelength of 175 nm or shorter, and an inert gas inflow means 22 for allowing an inert gas, preferably nitrogen, helium or argon, into a space in the atmosphere above the work surface of the work T. According to the present invention, the inert gas is allowed to flow into the above space, whereby the oxygen concentration between the ultraviolet light irradiation light source and the work surface is decreases, so that the absorption of the ultraviolet light beam is decreased.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I399787-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I397443-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113492576-A
priorityDate 1999-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431896
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451572542
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID510761
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID6585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID6586
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID20564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24857
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412483216
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID65047
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID20562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23987
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID224478

Total number of triples: 49.