http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I270670-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2494455c26307570a8f488ddc355f86a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-57 |
| filingDate | 2003-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_beb1ae2c1f9a07c6e944310ddbbc6c03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9801ebe15e10b97ce9d11f4390180216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76161a791bc74498b29294da821bf258 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8516b76f3976c0c9de298f9f17cd2f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b23dc3545720c1f1caf633c023c28b7a |
| publicationDate | 2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I270670-B |
| titleOfInvention | Lighting apparatus for inspecting substrate |
| abstract | Lighting apparatus for inspecting a substrate for providing optimal optical conditions for inspecting a surface of a large sized substrate, including a plurality of mirrors for respectively reflecting lights from a plurality of light sources moving on a curved surface in at least one direction of left/right and up/down directions, and Fresnel lenses for focusing divergent lights reflected at the mirrors onto one focal point, and illuminating the substrate on a stage, thereby simplifying a moving structure of the lighting apparatus and permitting a worker to carry out the inspection at one focal point without having movement of the focal point by illuminating a large area of a large sized substrate with a plurality of lights. |
| priorityDate | 2003-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID995 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414326734 |
Total number of triples: 20.