http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I269779-B
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7e0e42cba4bee6c48312821708b5d3a |
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
filingDate | 2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db206a0cd75f7bf9e09752b39e3b095a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f469c669b226729381b281adf17a5d8b |
publicationDate | 2007-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-I269779-B |
titleOfInvention | Method for manufacturing ZnO nano-structure |
abstract | A method for manufacturing ZnO nano-structures is described. In the method for manufacturing ZnO nano-structures, a substrate is provided, and a ZnO buffer layer may be alternatively grown on a surface of the substrate. Next, a MgZnO nucleation stabilization layer is formed on the ZnO buffer layer on the substrate. Then, a ZnO nano-rod structure layer is grown on a surface of the MgZnO nucleation stabilization layer. When only one of the ZnO buffer layer and the MgZnO nucleation stabilization layer is formed, the ZnO nano-structure layer formed sequentially is a ZnO nano-wall structure layer. |
priorityDate | 2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.