| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a6d8506893eb3a1f55731e5b0f21e32 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24998
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2984
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24983
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249988
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24372 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2003-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b96248376b1de887e242ce1c6776d1bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5502c861baf0e2b8cd0818875dc8d086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a540b5f7a3fd9d45a71392076b292aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6d394215953a4fcd5355e1db51bf289
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2aee0d66107ae4c4242ede7700b0a43 |
| publicationDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I268831-B |
| titleOfInvention |
Integral polishing pad and manufacturing method thereof |
| abstract |
An integral polishing pad includes an elastic support layer and a polishing layer, which is formed on the elastic support layer and has a higher hardness than the elastic support layer. The elastic support layer and the polishing layer are made from materials chemically compatible with each other so that a structural border between the elastic support layer and the polishing layer does not exist. In addition, the integral polishing pad also includes a transparent region, which is transparent to a light source used to detect the surface state of an object being polished and integrated with the other elements of the integral polishing pad. The integral polishing pad has high planarization efficiency and uniform properties, and thus can be reliably used for polishing. In addition, the integral polishing pad prevents a congestion of a polishing slurry and facilitates delivery of the polishing slurry. The integral polishing pad does not need an adhesive for connecting elements or a process for bonding the elements, thereby simplifying manufacturing processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I622459-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I552832-B |
| priorityDate |
2002-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |