| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_596f7ae3e79bc578e17a444424a1dee6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09G3-346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate |
2003-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38299f887f7ebc6d56fd8e1f8bc46dd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64581178b90a6cab7635ca0a4d155b00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7cd02ef3b710289e0226d81c84a5ddb |
| publicationDate |
2006-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I267667-B |
| titleOfInvention |
Fabrication of a reflective spatial light modulator |
| abstract |
Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support posts, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I585458-B |
| priorityDate |
2002-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |