http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I261299-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3fb751fc1583ed35203425a4bd16589f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3225 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322 |
| filingDate | 2005-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8895db523c0c0fc2fa69ee667d1855f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e4a34200658e0533330c1edaec805aa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32bfc20984d1a5f48304b9a9b9caf5d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52069253c76f91d4aa8441d936901416 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_881fea22252853596e5a69fd63366bd1 |
| publicationDate | 2006-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I261299-B |
| titleOfInvention | Method for heat-treating silicon semiconductor substrate, and the silicon semiconductor substrate treated thereby |
| abstract | To provide a method of freely controlling a proximity gettering structure, differing in request by device makers by optionally controlling M-shaped distribution form of BMD density, in the depth direction of a wafer, after being subjected to RTA in a nitrogen-containing atmosphere. A method of heat-treating a specified silicon wafer is provided to manufacture a silicon wafer, having no defective layer close to surface. In the heat-treatment method, a desired internal defect density distribution is formed by controlling the nitrogen density distribution in the depth direction of the silicon wafer to be heat-treated. |
| priorityDate | 2004-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.