| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2bb79367ec64b8bd089c3e72449bad58 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65H3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25B11-00 |
| filingDate |
2003-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_759d86f26f62eb1990839c1892b6e32d |
| publicationDate |
2006-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I257913-B |
| titleOfInvention |
Vacuum chuck |
| abstract |
A vacuum chuck is composed of a pad 3 for chucking and de-chucking a work W on a part of it's upper end, a ring 5 to keep the pad 3 on a board 7 and to make a vacuum space 4, a fitting screw 6 of the ring 5, the board 7 supporting the pad 3 on it's spherical part, and etc. and mounted on a robot hand 100. A vacuum chucking face 2 is courted with material having close order of electrification of the work such as SiO2. Circuit destruction is prevented by reducing quantity of the electrification on the work when removing the face 2 from the work. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111250880-A |
| priorityDate |
2002-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |