http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I257435-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2001-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5360aa370bc9dce1aa973d9c1e5d76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a80ee9b5856b6b5f0affa1b76d8adb4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bad9af37f6b570a239d0bb9f3c708ae1 |
| publicationDate | 2006-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I257435-B |
| titleOfInvention | MOCVD ferroelectric and dielectric thin films depositions using mixed solvents |
| abstract | A ferroelectric and dielectric source solution for use in chemical vapor deposition processes includes a ferroelectric/dielectric chemical vapor deposition precursor, and a solvent for carrying the ferroelectric/dielectric chemical vapor deposition precursor taken from the group of solvents consisting essentially of type A solvents, including tetraglyme, triglyme, triethylenetetramine, N,N,N',N'-tetramethylethylenediamine; N,N,N',N',N"",N""-pentamethyldiethylenetriamine; and 2,2'-bipyridine; type B solvents including tetrahydrofuran, butyl ethyl ether, tert-butyl ethyl ether, butyl ether, and pentyl ether; and type C solvents including iso-propanol, 2-butanol, 2-ethyl-l-hexanol, 2-pentanol, toluene, xylene and butyl acetate; and mixtures of solvent types A, B and C. |
| priorityDate | 2000-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 102.