http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I254359-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7e0e42cba4bee6c48312821708b5d3a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a7eeaf76c2b3ae72b035db237eee41d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de03a0e54c9a100d6f86c832ba3152c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_199f08ab628dfe115659fde81f7058f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4db349e24150b27b30be33f46d00e096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad6a379cab2981be0bea5c7f458887fd |
| publicationDate | 2006-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I254359-B |
| titleOfInvention | Improved mold releasing layer of reverse imprinting lithography and the applying method of the same |
| abstract | An improved mold-releasing layer of reverse imprinting lithography is provided by present invention for resolving the problems that a resist did not fill the grooves of an imprinting mold treated by an anti-adhesive layer in a etch process. The improved mold-releasing layer of reverse imprinting lithography comprises an anti-adhesive layer formed on the surface of the pattern preformed on an imprinting mold, and a surfactant-layer spread on the anti-adhesive layer. By this way, the resist would was completely filled in the micro/nano-features on the mold. Then the pattern of mold was transferred to any substrate with high fidelity by contacting process. This improved reverse imprinting can control the spin-coating parameter to tune the thickness of residual layer and apply to large area substrate, including hard or flexible substrate. |
| priorityDate | 2005-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.