| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46 |
| filingDate |
2002-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1463c6b187ac98a85ab9fa0781c27195
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dafbcbe3d9da0763a3ccd2d279d9817e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b6234a0ae48e6df83da3f4871e22566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ae8d1a2f3c5c540506e40d5751e1047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6972736eb8976dc9bc9184b32d4a0619 |
| publicationDate |
2006-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I253087-B |
| titleOfInvention |
A method of depositing an organic porous dielectric material |
| abstract |
A method of depositing an organic porous dielectric material. Ethylene, a cyclosiloxane compound and a silane compound are directed to pass a gas distributor into a plasma reaction zone to deposit an organic porous dielectric material on a substrate. |
| priorityDate |
2002-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |