| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8a9982b1666c54b5bf02d6c944891e4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-4025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-4031 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2004-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8ae957e856875e8c4c5d116a8b2fd08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c1053853e6155ad2621ecc2e075ec49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f8bd80ecfd70b10b65d0c6d694d9fc4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99a445de84488ad351ae681516923f6f |
| publicationDate |
2006-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I252914-B |
| titleOfInvention |
Semiconductor array tester |
| abstract |
An array tester (10) characterizes individual ones (111) of a semiconductor devices of an array (11) based on polarization-resolving an optical far-field measurement of the individual chips (111) as a function of angular position. Two pairs of TM and TE detectors (41a-b and 42a-b) or one pair displaceable by ninety degrees, move in vertical and horizontal arc paths or fixed around a fixed position of a selected device of an array to sample the far-fields. |
| priorityDate |
2003-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |