http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I252383-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_515262dca048e434990a1670088a10fa |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate | 2001-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9407f85de4bb3745e4958fdf7ee4684e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fb9adf8d4df3a3d111cdc5df59f90e2 |
| publicationDate | 2006-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I252383-B |
| titleOfInvention | Photosensitive polysilazane composition, pattern-forming method using it, and calcination method of its coating film |
| priorityDate | 2001-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 227.