http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I249773-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2005-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e32cc21fcf2a308ee8656127521541b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd659c38390185966ce392da39499ae9 |
| publicationDate | 2006-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I249773-B |
| titleOfInvention | Etching Method and method for forming contact opening |
| abstract | An etching method is described, including a first etching step and a second etching step. The temperature of the second etching step is higher than that of the first etching step, such that the after-etching-inspection (AEI) critical dimension is smaller than the after-development-inspection (ADI) critical dimension. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512582-B2 |
| priorityDate | 2005-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.