http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I247624-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-2092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8662 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J35-0006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 |
| filingDate | 2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83d100a498dcb9cf0c92a648e09f175b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb3ec7524060977a2d29acc0a4bdd98 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e69ce3dc6efcf37fe47a51771dd08e9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 |
| publicationDate | 2006-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I247624-B |
| titleOfInvention | Decompositionally treating agent and decompositionally treating method for fluorocarbons |
| abstract | There are disclosed a decompositionally treating agent for fluorocarbons which comprises an aluminum compound and a lanthanoid compound as effective ingredients; a decompositionally treating agent for fluorocarbons which comprises an aluminum compound, a lanthanoid compound and an alkaline earth metal compound as effective ingredients; and a decompositionally treating method for fluorocarbons which comprises decomposing a fluorocarbon by bringing a fluorocarbon-containing gas into contact under heating with a decompositionally treating agent mentioned above or by bringing the above gas into contact under heating with a decompositionally treating agent comprising aluminum oxide as an effective ingredient and thereafter with a decompositionally treating agent comprising a lanthanoid oxide and an alkaline earth metal oxide. It is made possible by the above agent and method to decompose the fluorocarbons contained in an exhaust gas exhausted from a semiconductor manufacturing industry and the like at a decomposition rate of at least 99.9% at a relatively low decomposition temperature of 1000 DEG C or lower without deactivating the agent in a short time, or exhausting a corrosive gas such as hydrogen fluoride in the atmosphere. |
| priorityDate | 2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.