http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I247092-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f889eb3bd3bea07e88a57bcf54a2c657 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2004-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6135581781e0ba760b3e8dc1d50b4080 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b7f4c307c0240dc8b16b817780be03b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81b02ab7dca1e0196189a4fd104775fa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ae5b9c94bda31564785d5cc8e8b0039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47998abb1f638930c9a67e1e20b3fdaa |
| publicationDate | 2006-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I247092-B |
| titleOfInvention | Parallel multi-beam scanning co-focal measurement system and method |
| abstract | The invented parallel multi-beam scanning co-focal measurement system comprises a computer system and a measurement module. The measurement module is connected with the computer to be used to measure the surface of a to-be-measured object and comprises a light source generator, a light path transmission system, a program controllable reflection module and a CCD scanning module. The light path transmission system defines a first light path and a second light path. The program controllable reflection module controls a micro electromechanical array micro lens to determine the light dot projection pattern of the first light path. The CCD scanning module obtains the light dot scanning pattern at the second light path. The computer system calculates the surface height of the to-be-measured object according to relationship between the light dot projection pattern and the light dot scanning pattern. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8416491-B2 |
| priorityDate | 2004-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.