| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31705
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J3-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-026 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02 |
| filingDate |
2001-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_706adc2974910b5c4c721b52643c7de0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bfb08ad45f3f1a97decfe69d833f57d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3076199e6fd6c885bb616da56d68c2b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45f142a34e7dcd08e8defb2b28695992 |
| publicationDate |
2005-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I246105-B |
| titleOfInvention |
System and method for removing particles entrained in an ion beam |
| abstract |
A system for inhibiting the transport of contaminant particles with an ion beam includes an electric field generator (12, 14) for generating an electric field (28) relative to a path of travel (20) for the ion beam (16). A particle (66) located in the ion beam (16) and in a region of the electric field (28) is charged to a polarity according to the ion beam (16), so that the electric field (28) may urge the charged particle (66) out of the ion beam (16). |
| priorityDate |
2000-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |