| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd7c27b9ec61781656e6f039702fd568 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2003-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fc75886a21f7c03989173ca0b64e912
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fadae8d6c0b67ab7081f48f243d31e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49e79031903a3aac40068916e3eaa60f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f68f5823b17a9466b69588461f9b41a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bf4c71644522d06c0cd5c8fa24c126b |
| publicationDate |
2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I236456-B |
| titleOfInvention |
Method for preparation of aluminum oxide thin film |
| abstract |
AN aluminum oxide film is formed on a substrate by a process comprising (A) bring the vapor of a dialkylaluminum alkoxide into contact with the substrate mounted in a deposition reactor so that an aluminum-containing adsorption layer is formed on the substrate; (B) removing the unreacted aluminum compound and by-products from the reactor; (C) introducing an oxygen source into the reactor so that the oxygen source reacts with the aluminum-containing adsorption layer to form an aluminum oxide layer; and (D) removing the unreacted oxygen source and by-products from the reactor. |
| priorityDate |
2002-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |