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filingDate 2003-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2005-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_730dc2618838f5249448e1c1e2ce9120
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publicationDate 2005-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I235761-B
titleOfInvention Slurry for polishing copper-based metal
abstract The present invention relates to a slurry for polishing copper-based metal containing a silica polishing material, an oxidizing agent, an amino acid, a triazole-based compound and water, wherein a content ratio of said amino acid to said triazole-based compound (amino acid/triazole-based compound (weight ratio)) is 5 to 8.
priorityDate 2002-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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