http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I235463-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_260220c525b214105ee48ee2d77a5bf4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 |
| filingDate | 1999-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29c1b51e9058c2c07aa45ff6b79834d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee171726273f82c798aea2bdc62b21e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e5670d06cfc1bf9d7f3bf0b2d215854 |
| publicationDate | 2005-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I235463-B |
| titleOfInvention | Low dielectric constant films with high glass transition temperatures made by electron beam curing |
| abstract | Production of a dielectric coating on a substrate whereby a poly(arylene ethers) or fluorinated poly(arylene ethers) layer is cured by exposure to electron beam radiation. A wide area electron beam is used which causes chemical reactions to occur in the polymer structure which are thought to cause crosslinks between polymer chains. The crosslinks lead to higher mechanical strength and higher glass transition temperature, lower thermal expansion coefficient, greater thermal-chemical stability and greater resistance to aggressive organic solvents. The polymer layer may also be optionally heated, thermally annealed, and/or exposed to UV actinic light. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102157439-A |
| priorityDate | 1998-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.