| abstract |
A polyester film for dry film photo-resists, which satisfies requirement for transparency, particularly transmittance of radiation having a wavelength around 365 nm, slipperiness, winding properties, resolution and recyclability. A polyester film for dry film photo-resists has a thickness thicker than 10 mum and less than 25 mum, a haze value of 3% or less and a residual polycondensation catalyst content of less than 150 ppm, and a metal antimony content of 15 mmol% or less based on the total of all the acid component, and a laminated polyester film comprising a lubricating layer on at least one side of the film. |