| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ed225a22fbdfd13ecd30f84f25011aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd29b59ed6213a3e1efc387644d7d50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70190b5a5fb9ff3ba85ff62c810a637b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8032748f886f7cb8b83221ce4ac8a862 |
| publicationDate |
2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I232496-B |
| titleOfInvention |
Integrated circuits with air gaps and method of making same |
| abstract |
An integrated circuits with air gaps is disclosed. An underlayer is formed on a substrate. A first metal pattern is formed on the underlayer. A dielectric layer is deposited on the underlayer and the first metal pattern. A second metal pattern is formed on the dielectric layer. Utilizing the first metal pattern and the second metal pattern as masks, an isotropic etch process is performed on the dielectric layer and the underlayer. A plurality of holes is formed in the dielectric layer and the remaining dielectric layer serves as supports under the second metal pattern. A chemical vapor deposition process is performed to deposit a cap layer on the second metal pattern and to seal the holes. |
| priorityDate |
2002-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |