http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I232481-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2003-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3aa93f78e0540c723b6c1b67dc3e9004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4925ce63ebc8e5e29ec3438ddc918ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc72669bf4cbdef0f5057932d01aaf2a |
| publicationDate | 2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I232481-B |
| titleOfInvention | Manufacturing method for semiconductor device and the semiconductor device |
| abstract | The present invention provides a manufacturing method for semiconductor device, which includes the following steps: forming a first low-k insulation film on a semiconductor substrate; forming the photoresist pattern on the first low-k insulation film; using the photoresist pattern to etch the first low-k insulation film; forming the recess portion in the first low-k insulation film; after removing the photoresist pattern, burying the conductive film into the recess portion; after burying the conductive film and during removing the photoresist pattern, removing the deteriorated layer on the sidewall of the recess portion of the first low-k insulation film; and, forming the second low-k insulation film as generating the clearance on the sidewall of the recess portion by burying and removing the deteriorated layer. |
| priorityDate | 2002-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.