http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I232468-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-06 |
| filingDate | 2000-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bee50e65447e045d4dacda0c23cbbbf7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39b5733a9a70f6d6c40efd27299cfbb3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c690575ada7b4a72bc678f96af9e1fed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3342a5da02e14753ca927298c2dcea3 |
| publicationDate | 2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I232468-B |
| titleOfInvention | Composition for film formation and material for insulating film formation |
| abstract | A composition for film formation which is useful as an interlayer insulating film material in the production of semiconductor devices and the like, and gives a coating film having excellent uniformity, low dielectric constant, low leakage current and excellent storage stability; and a material for insulating film formation using the composition. The composition comprises (A) a product of hydrolysis and condensation obtained by hydrolyzing and condensing at least one compound selected from the group consisting of (A-1) compounds represented by the formula (1): R1aSi(OR2)4-a, and (A-2) compounds represented by the formula (2): R3b(R4O)3-bSi-(R7)d-Si(OR5)3-cR6c; and (B) a compound represented by the formula (3): R8O(CHCH3CH2O)eR9. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I393746-B |
| priorityDate | 1999-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 542.