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filingDate 2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2005-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I230561-B
titleOfInvention Manufacturing apparatus for organic EL display device and manufacturing process for organic EL display device using the apparatus
abstract Provided are a manufacturing apparatus and a manufacturing process which make it possible to obtain effectively an organic EL display device capable of suppressing the generation of dark spots for a long time even in a high temperature environment. Therefore, an apparatus for manufacturing an organic EL display device comprises a first unit for carrying a supporting substrate in, a second unit for heating at least the supporting substrate before forming an organic luminescence medium, thereby performing a dehydration treatment, a third unit for forming the organic luminescence medium and an upper electrode, and a fourth unit for sealing the periphery of the apparatus with a sealing member, in which the first unit is arranged between the second unit and the third unit, a first carrying device is set up in the first unit, and a second carrying device is arranged between the third unit and the fourth unit.
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