| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0318 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67766
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-07 |
| filingDate |
2002-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b16f10d92e5ba8b859924235fd69d592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ae8711f6a69e6145287e5e449622fda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_602056544d53cf661e335f65ba6db31e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ac9dc46097762aad079b465fe1c35f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fa2d99c381c72156e4ac8a2fc096732 |
| publicationDate |
2005-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I229916-B |
| titleOfInvention |
A substrate processing system and operation method thereof |
| abstract |
In a first aspect, a first substrate processing system is provided that include (1) a chamber having a plurality of openings through which a substrate may be transported; (2) a substrate carrier opener coupled to a first one of the plurality of openings; (3) a thermal processing chamber coupled to a second one of the plurality of openings; and (4) a wafer handler contained within the chamber, having a substrate clamping blade and a blade adapted to transport high temperature substrate. Numerous other aspects are provided, as are methods and computer program products in accordance with these and other aspects. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9525099-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I496233-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10062600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543114-B2 |
| priorityDate |
2001-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |