http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I229419-B

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filingDate 2003-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2005-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67f56e5bc623f44b2a7c25aab9e137f
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publicationDate 2005-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I229419-B
titleOfInvention Semiconductor memory device and its production process
abstract The present invention provides a semiconductor memory device comprising: a first conductivity type semiconductor substrate; and a plurality of memory cells constituted of an island-like semiconductor layer which is formed on the semiconductor substrate, and a charge storage layer and a control gate which are formed entirely or partially around a sidewall of the island-like semiconductor layer, wherein the plurality of memory cells are disposed in series, the island-like semiconductor layer which constitutes the memory cells has cross-sectional areas varying in stages in a horizontal direction of the semiconductor substrate, and an insulating film capable of passing charges is provided at least in a part of a plane of the island-like semiconductor layer horizontal to the semiconductor substrate.
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