abstract |
This invention provides barium titanate having smaller particle size, less impurity and excellent electric characteristics, which can be used in forming thin film dielectric ceramics or thin film dielectric body used for miniaturized capacitor in electronic machine miniaturization. The barium titanate is single crystal in the form of particles, which comprises particles without a void having a diameter of 1 nm or more in an amount of 20% or more by number of the total particles. By using a polishing liquid, thin film, dielectric materials and piezoelectric materials which contains the barium titanate, electronic machines can be miniaturized. |