| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S95-902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-4525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S95-901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2223-0123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2256-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0446
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-22 |
| filingDate |
1999-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e597ff1aa10e45c351ac6ac2326c607b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ebb20d99274ca0d378ba2723e550a7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3151bbaad21698a254f30777aa727857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9289bfae4dbadeb05b1603ec8b31a758 |
| publicationDate |
2005-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I228260-B |
| titleOfInvention |
Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
| abstract |
A sorbent-based gas storage and dispensing system, including a storage and dispensing vessel containing a solid-phase physical sorbent medium having a sorbate gas physically adsorbed thereon. A chemisorbent material is provided in the vessel to chemisorb the impurities for gas phase removal thereof in the storage and dispensing vessel. Desorbed sorbate gas is discharged from the storage and dispensing vessel by a dispensing assembly coupled to the vessel. The chemisorbent may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane, and installed in the vessel at the time of sorbent material loading. Semiconductor manufacturing processes and products manufactured by such processes are described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111170288-A |
| priorityDate |
1998-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |