| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f09378c018e7719f171f7e91f2dd60fd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0585 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-03 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 |
| filingDate |
1999-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e266f4cb3b8de826114f79c58113b74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db463d923044fbc3149fade8ea6fcbc6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4e9b8eab96d99ebe2c8fae7bd50b35e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd5852efdbfe5a965dd83393e04e95ae |
| publicationDate |
2005-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I225974-B |
| titleOfInvention |
Process for forming a pattern |
| abstract |
The object of the invention is to provide a process for forming a pattern. The process for forming a pattern is characterized by comprising the following steps: (1) laminating an energy ray-sensitive coat layer onto the surface of a resin layer for forming an insulating coat, then (2) irradiating active energy rays or heat rays via a mask or directly so as to obtain the desired pattern, (3) developing the energy ray-sensitive coat layer, and forming a resist pattern coat with the energy ray-sensitive coat layer, and (4) furthermore, removing the resin layer for forming insulating coat with a developing treatment so as to obtain the desired pattern. |
| priorityDate |
1998-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |